Inventor
ABELSON JOHN R
US6 patents
⚠️ This page may combine multiple inventors who share the name “ABELSON JOHN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV ILLINOIS
4 patentsUS7943527B2May 17, 2011
Surface preparation for thin film growth by enhanced nucleation
UNIV ILLINOIS30 citations91
US8362220B2Jan 29, 2013
Metal complex compositions and methods for making metal-containing films
UNIV ILLINOIS14 citations83
US7592254B2Sep 22, 2009
Methods for coating and filling high aspect ratio recessed features
UNIV ILLINOIS15 citations82
US11584986B1Feb 21, 2023
Area selective CVD of metallic films using precursor gases and inhibitors
UNIV ILLINOIS12 citations81