P

Inventor

TAKAHASHI TARO

JP78 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI TARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

20 patents
US7670206B2Mar 2, 2010

Substrate polishing apparatus and substrate polishing method

EBARA CORP27 citations92
US9272389B2Mar 1, 2016

Polishing apparatus and polishing method

EBARA CORP12 citations84
US7854646B2Dec 21, 2010

Substrate polishing apparatus and substrate polishing method

EBARA CORP12 citations84
US11583973B2Feb 21, 2023

Polishing apparatus

EBARA CORP4 citations75
US10688620B2Jun 23, 2020

Polishing apparatus

EBARA CORP2 citations73
US9632061B2Apr 25, 2017

Eddy current sensor and polishing method

EBARA CORP6 citations73
US9555517B2Jan 31, 2017

Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method

EBARA CORP4 citations73
US10933507B2Mar 2, 2021

Polishing apparatus

EBARA CORP2 citations72
US9437507B2Sep 6, 2016

Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor

EBARA CORP3 citations72
US12285836B2Apr 29, 2025

End point detection method, polishing apparatus, and polishing method

EBARA CORP0 citations63
US10759019B2Sep 1, 2020

End point detection method, polishing apparatus, and polishing method

EBARA CORP1 citations63
US10744617B2Aug 18, 2020

Polishing endpoint detection method

EBARA CORP1 citations63
US11667007B2Jun 6, 2023

Polishing apparatus and polishing method

EBARA CORP1 citations62
US10739488B2Aug 11, 2020

Metal detection sensor and metal detection method using same

EBARA CORP1 citations62
US7960188B2Jun 14, 2011

Polishing method

EBARA CORP3 citations62
US12083646B2Sep 10, 2024

Polishing apparatus, polishing method and method for outputting visualization information of film thickness distribution on substrate

EBARA CORP1 citations61
US12123714B2Oct 22, 2024

Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor

EBARA CORP0 citations60
US11852472B2Dec 26, 2023

Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor

EBARA CORP0 citations60
US12571767B2Mar 10, 2026

Eddy current sensor, polishing apparatus, and film thickness detection method

EBARA CORP0 citations59
US6471768B2Oct 29, 2002

Method of and apparatus for growing ribbon of crystal

EBARA CORP3 citations59

FUJI OIL CO LTD

10 patents

HITACHI LTD

4 patents

TAKAHASHI TARO

4 patents

TOYOTA MOTOR CO LTD

4 patents

YOKOHAMA RUBBER CO LTD

2 patents

TADA MITSUO

2 patents

UNIV TOKYO

1 patent

KOBAYASHI YOICHI

1 patent

HORI MASANORI

1 patent

TOSHIBA KK

1 patent

Showing the top 50 of 78 patents by PatentIndex Score.