Inventor
MIYASAKA MAMI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MIYASAKA MAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC ELECTRONICS CORP
3 patentsUS6958201B2Oct 25, 2005
Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus
NEC ELECTRONICS CORP1 citations59
US6645676B1Nov 11, 2003
Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus
NEC ELECTRONICS CORP2 citations59
US6861657B2Mar 1, 2005
Electron beam exposure mask, electron beam exposure method, method of fabricating semiconductor device, and electron beam exposure apparatus
NEC ELECTRONICS CORP0 citations48