Inventor
LAU STEPHEN YU-HONG
US10 patents
⚠️ This page may combine multiple inventors who share the name “LAU STEPHEN YU-HONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS8734663B2May 27, 2014
Purging of porogen from UV cure chamber
NOVELLUS SYSTEMS INC19 citations92
US10121682B2Nov 6, 2018
Purging of porogen from UV cure chamber
NOVELLUS SYSTEMS INC5 citations83
US9384959B2Jul 5, 2016
Purging of porogen from UV cure chamber
NOVELLUS SYSTEMS INC7 citations83
US10221484B2Mar 5, 2019
Temperature controlled showerhead
NOVELLUS SYSTEMS INC9 citations82
US9073100B2Jul 7, 2015
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC8 citations82
US10020197B2Jul 10, 2018
Method for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC2 citations71
US11177131B2Nov 16, 2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC0 citations59