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Inventor
TANIGUCHI YOSHIHUMI
JP
2 patents
Patents
2 patents
US7888641B2
Feb 15, 2011
Electron microscope with electron spectrometer
HITACHI HIGH TECH CORP
6 citations
70
US8344320B2
Jan 1, 2013
Electron microscope with electron spectrometer
HITACHI HIGH TECH CORP
4 citations
59