Inventor
LAHOTI SANJEEV
US6 patents
⚠️ This page may combine multiple inventors who share the name “LAHOTI SANJEEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
REVANKAR VITHAL
5 patentsUS8657958B2Feb 25, 2014
CVD-Siemens monosilane reactor process with complete utilization of feed gases and total recycle
REVANKAR VITHAL3 citations57
US8399072B2Mar 19, 2013
Process for improved chemcial vapor deposition of polysilicon
REVANKAR VITHAL3 citations57
US8993056B2Mar 31, 2015
Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactor
REVANKAR VITHAL1 citations47
US8124039B2Feb 28, 2012
Process of silicon tetrafluoride gas synthesis
REVANKAR VITHAL0 citations47
US7897125B1Mar 1, 2011
Silicon tetrafluoride byproduct separation process
REVANKAR VITHAL0 citations36