Inventor

KAZINCZI ROBERT

NL5 patents

⚠️ This page may combine multiple inventors who share the name “KAZINCZI ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAZINCZI ROBERT

1 patent

US8237913B2Aug 7, 2012

Lithographic apparatus and method

KAZINCZI ROBERT3 citations54

CAVENDISH KINETICS B V

1 patent

US7613039B2Nov 3, 2009

Arrangement and method for controlling a micromechanical element

CAVENDISH KINETICS B V3 citations51

HANSEN STEVEN GEORGE

1 patent

US8576377B2Nov 5, 2013

Lithographic apparatus and device manufacturing method

HANSEN STEVEN GEORGE1 citations49

CAVENDISH KINETICS INC

1 patent

US7965547B2Jun 21, 2011

Arrangement and method for controlling a micromechanical element

CAVENDISH KINETICS INC0 citations46

ENGELEN ADRIANUS FRANSISCUS PETRUS

1 patent

US9696635B2Jul 4, 2017

Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process

ENGELEN ADRIANUS FRANSISCUS PETRUS1 citations40