Inventor
DENPOH KAZUKI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “DENPOH KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS9941097B2Apr 10, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD110 citations99
US5718763AFeb 17, 1998
Resist processing apparatus for a rectangular substrate
TOKYO ELECTRON LTD154 citations99
US7847247B2Dec 7, 2010
Method of plasma particle simulation, storage medium, plasma particle simulator and plasma processing apparatus
TOKYO ELECTRON LTD32 citations92
US6828243B2Dec 7, 2004
Apparatus and method for plasma treatment
TOKYO ELECTRON LTD18 citations92
US6514347B2Feb 4, 2003
Apparatus and method for plasma treatment
TOKYO ELECTRON LTD17 citations92
US9997332B2Jun 12, 2018
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD11 citations84
US7691226B2Apr 6, 2010
Electron temperature measurement method, electron temperature measurement program for implementing the method, and storage medium storing the electron temperature measurement program
TOKYO ELECTRON LTD9 citations84
US7713431B2May 11, 2010
Plasma processing method
TOKYO ELECTRON LTD16 citations82
US5853803ADec 29, 1998
Resist processing method and apparatus
TOKYO ELECTRON LTD12 citations74
US10804076B2Oct 13, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD3 citations73
US9899191B2Feb 20, 2018
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations63
US9455133B2Sep 27, 2016
Hollow cathode device and method for using the device to control the uniformity of a plasma process
TOKYO ELECTRON LTD0 citations52
YAMAZAWA YOHEI
4 patentsUS9313872B2Apr 12, 2016
Plasma processing apparatus and plasma processing method
YAMAZAWA YOHEI52 citations98
US9253867B2Feb 2, 2016
Plasma processing apparatus and plasma processing method
YAMAZAWA YOHEI11 citations84
US8741097B2Jun 3, 2014
Plasma processing apparatus and plasma processing method
YAMAZAWA YOHEI7 citations84
US8608903B2Dec 17, 2013
Plasma processing apparatus and plasma processing method
YAMAZAWA YOHEI9 citations84