Inventor
YEH MING-LING
US5 patents
⚠️ This page may combine multiple inventors who share the name “YEH MING-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7135402B2Nov 14, 2006
Sealing pores of low-k dielectrics using CxHy
TAIWAN SEMICONDUCTOR MFG59 citations94
US7564136B2Jul 21, 2009
Integration scheme for Cu/low-k interconnects
TAIWAN SEMICONDUCTOR MFG31 citations92
US7365026B2Apr 29, 2008
CxHy sacrificial layer for cu/low-k interconnects
TAIWAN SEMICONDUCTOR MFG10 citations83
US8043959B2Oct 25, 2011
Method of forming a low-k dielectric layer with improved damage resistance and chemical integrity
TAIWAN SEMICONDUCTOR MFG3 citations62