Inventor
MATSUDA RYUICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MATSUDA RYUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI HEAVY IND LTD
10 patentsUS7335315B2Feb 26, 2008
Method and device for measuring wafer potential or temperature
MITSUBISHI HEAVY IND LTD10 citations83
US10616989B2Apr 7, 2020
Plasma generation apparatus including measurement device and plasma thruster
MITSUBISHI HEAVY IND LTD3 citations73
US8908720B2Dec 9, 2014
Directed-energy irradiating apparatus
MITSUBISHI HEAVY IND LTD5 citations71
US7283346B2Oct 16, 2007
Electrostatic chuck and its manufacturing method
MITSUBISHI HEAVY IND LTD4 citations62
US9011634B2Apr 21, 2015
Plasma processing apparatus and plasma processing method
MITSUBISHI HEAVY IND LTD2 citations61
US7520246B2Apr 21, 2009
Power supply antenna and power supply method
MITSUBISHI HEAVY IND LTD2 citations61
US11322903B2May 3, 2022
Solid state laser apparatus
MITSUBISHI HEAVY IND LTD0 citations51
US11063403B2Jul 13, 2021
Solid-state laser device
MITSUBISHI HEAVY IND LTD0 citations51
US10164397B2Dec 25, 2018
Laser oscillation device
MITSUBISHI HEAVY IND LTD1 citations51
US9263848B2Feb 16, 2016
Directed-energy irradiating apparatus
MITSUBISHI HEAVY IND LTD0 citations50
CANON ANELVA CORP
3 patentsUS7977243B2Jul 12, 2011
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
CANON ANELVA CORP37 citations91
US7588799B2Sep 15, 2009
Metal film production apparatus
CANON ANELVA CORP4 citations62
US7659209B2Feb 9, 2010
Barrier metal film production method
CANON ANELVA CORP2 citations61
MATSUDA RYUICHI
3 patentsUS8662010B2Mar 4, 2014
Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method
MATSUDA RYUICHI2 citations59
US8480912B2Jul 9, 2013
Plasma processing apparatus and plasma processing method
MATSUDA RYUICHI2 citations59
US8960124B2Feb 24, 2015
Plasma processing apparatus and plasma processing method
MATSUDA RYUICHI0 citations38