Inventor

NIJKERK MICHIEL DAVID

NL7 patents

⚠️ This page may combine multiple inventors who share the name “NIJKERK MICHIEL DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TNO

2 patents

US7732762B2Jun 8, 2010

Method of inspecting a specimen surface, apparatus and use of fluorescent material

TNO11 citations82

US9383490B2Jul 5, 2016

Depolarizer, telescope and remote sensing device and method

TNO0 citations40

KRUIZINGA BORGERT

1 patent

US8559108B2Oct 15, 2013

Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system

KRUIZINGA BORGERT5 citations64

ZEISS CARL SMT AG

1 patent

US7646004B2Jan 12, 2010

Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element

ZEISS CARL SMT AG2 citations58

WEDOWSKI MARCO

1 patent

US8164077B2Apr 24, 2012

Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element

WEDOWSKI MARCO3 citations56

ASML NETHERLANDS BV

1 patent

US7379153B2May 27, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations55

VISSER HUIBERT

1 patent

US9304300B2Apr 5, 2016

Anamorphotic telescope

VISSER HUIBERT0 citations38