Inventor

KAJITA Yasuhito

JP3 patents

Patents

3 patents

US9515223B2Dec 6, 2016

Semiconductor light emitting device substrate including an uneven structure having convex portions, and a flat surface therebetween

OJI HOLDINGS CORP2 citations57

US9748441B2Aug 29, 2017

Dry etching method of manufacturing semiconductor light emitting device substrate

OJI HOLDINGS CORP0 citations47

US9911897B2Mar 6, 2018

Method for producing substrate for semiconductor light emitting elements, method for manufacturing semiconductor light emitting element, substrate for semiconductor light emitting elements, and semiconductor light emitting element

OJI HOLDINGS CORP0 citations46