Inventor
NELSON MICHAEL L
US18 patents
⚠️ This page may combine multiple inventors who share the name “NELSON MICHAEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
6 patentsUS6859260B2Feb 22, 2005
Method and system for improving focus accuracy in a lithography system
ASML HOLDING NV12 citations81
US7119883B2Oct 10, 2006
Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light
ASML HOLDING NV6 citations73
US7474384B2Jan 6, 2009
Lithographic apparatus, device manufacturing method, and a projection element for use in the lithographic apparatus
ASML HOLDING NV6 citations62
US7248336B2Jul 24, 2007
Method and system for improving focus accuracy in a lithography system
ASML HOLDING NV1 citations60
US7053984B2May 30, 2006
Method and systems for improving focus accuracy in a lithography system
ASML HOLDING NV3 citations60
US7633599B2Dec 15, 2009
Apparatuses and methods for changing an intensity distribution of light within an illumination field without distorting the telecentricity of the light
ASML HOLDING NV0 citations51
HEYMAN JERROLD M
4 patentsUS9639832B2May 2, 2017
Software license serving in a massively parallel processing environment
HEYMAN JERROLD M2 citations68
US9213952B2Dec 15, 2015
Automatic scheduling tool
HEYMAN JERROLD M4 citations64
US8776058B2Jul 8, 2014
Dynamic generation of VM instance at time of invocation
HEYMAN JERROLD M3 citations52
US9721240B2Aug 1, 2017
Software license serving in a massively parallel processing environment
HEYMAN JERROLD M0 citations47