Inventor

SU YU-CHUNG

TW23 patents

⚠️ This page may combine multiple inventors who share the name “SU YU-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SU YU-CHUNG

TAIWAN SEMICONDUCTOR MFG CO LTD

FinFET structures and methods of forming the same

Anti-reflective layer and method

CMP-friendly coatings for planar recessing or removing of variable-height layers

Method for forming multi-layer mask

Anti-reflective gap filling materials and methods

Composition and method for lithography patterning

Anti-reflective coating materials

Resist solvents for photolithography applications

Method of forming photoresist pattern

Method for manufacturing a semiconductor device

Method for forming multi-layer mask

Polymer resin comprising gap filling materials and methods

Gap filling materials and methods

Photosensitive material for photoresist and lithography

Air gap formation method

Method and structure for gap filling improvement

Method and structure for gap filling improvement

Method of forming photoresist pattern

TAIWAN SEMICONDUCTOR MFG

Anti-reflective layer and method

Lithography process and composition with de-crosslinkable crosslink material

Method and apparatus for planarization of substrate coatings

HON HAI PREC IND CO LTD

Imaging lens and electronic device having the same

Lens module including five lenses of −+++− refractive powers, and electronic device using the same