P

Inventor

WANG CHUNG-CHENG

TW26 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHUNG-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

12 patents
US10534267B2Jan 14, 2020

Lithography patterning with flexible solution adjustment

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10386723B2Aug 20, 2019

Lithography patterning with flexible solution adjustment

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10203606B1Feb 12, 2019

Apparatus and method for dispensing developer onto semiconductor substrate

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12347682B2Jul 1, 2025

Using cumulative heat amount data to qualify hot plate used for post-exposure baking

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12062542B2Aug 13, 2024

Using cumulative heat amount data to qualify hot plate used for postexposure baking

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11531271B2Dec 20, 2022

Lithography patterning with flexible solution adjustment

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11222783B2Jan 11, 2022

Using cumulative heat amount data to qualify hot plate used for postexposure baking

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10935888B2Mar 2, 2021

Lithography patterning with flexible solution adjustment

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10345718B2Jul 9, 2019

Pattern forming method and apparatus for lithography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9737832B2Aug 22, 2017

System and method for dispensing photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9446331B2Sep 20, 2016

System and method for dispensing photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9786524B2Oct 10, 2017

Developing unit with multi-switch exhaust control for defect reduction

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41

AIROHA TECH CORP

4 patents

WANG CHUNG-CHENG

4 patents

IND TECH RES INST

1 patent

TFL LAN INC

1 patent

FU CHI-HUA

1 patent

RAFAEL MICROELECTRONICS INC

1 patent

WANG CHUNG CHENG

1 patent

MEDICUSTEK INC

1 patent