Inventor
NAIM MAHMOOD
US5 patents
⚠️ This page may combine multiple inventors who share the name “NAIM MAHMOOD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FM IND INC
3 patentsUS10388492B2Aug 20, 2019
Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings therefor
FM IND INC2 citations63
US9790581B2Oct 17, 2017
Emissivity controlled coatings for semiconductor chamber components
FM IND INC0 citations42
US9543183B2Jan 10, 2017
Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same
FM IND INC0 citations30