Inventor
EFRATY BORIS
IL5 patents
⚠️ This page may combine multiple inventors who share the name “EFRATY BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9874527B2Jan 23, 2018
Removing process-variation-related inaccuracies from scatterometry measurements
KLA TENCOR CORP3 citations71
US10242290B2Mar 26, 2019
Method, system, and user interface for metrology target characterization
KLA TENCOR CORP2 citations69
US10408602B2Sep 10, 2019
Quality estimation and improvement of imaging metrology targets
KLA TENCOR CORP0 citations49
US10366483B2Jul 30, 2019
Wafer notch detection
KLA TENCOR CORP0 citations43