Inventor
GUGGILLA SRINIVAS
US15 patents
Patents
15 patentsUS10700087B2Jun 30, 2020
Multi-layer stacks for 3D NAND extendibility
APPLIED MATERIALS INC8 citations84
US9646876B2May 9, 2017
Aluminum nitride barrier layer
APPLIED MATERIALS INC9 citations83
US11569257B2Jan 31, 2023
Multi-layer stacks for 3D NAND extendability
APPLIED MATERIALS INC4 citations74
US10002834B2Jun 19, 2018
Method and apparatus for protecting metal interconnect from halogen based precursors
APPLIED MATERIALS INC3 citations73
US10109520B2Oct 23, 2018
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers
APPLIED MATERIALS INC2 citations72
US9633839B2Apr 25, 2017
Methods for depositing dielectric films via physical vapor deposition processes
APPLIED MATERIALS INC2 citations72
US11527408B2Dec 13, 2022
Multiple spacer patterning schemes
APPLIED MATERIALS INC4 citations71
US9984976B2May 29, 2018
Interconnect structures and methods of formation
APPLIED MATERIALS INC2 citations71
US6908865B2Jun 21, 2005
Method and apparatus for cleaning substrates
APPLIED MATERIALS INC10 citations71
US11315787B2Apr 26, 2022
Multiple spacer patterning schemes
APPLIED MATERIALS INC0 citations60
US11101117B2Aug 24, 2021
Methods and apparatus for co-sputtering multiple targets
APPLIED MATERIALS INC0 citations59
US10707122B2Jul 7, 2020
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers
APPLIED MATERIALS INC0 citations51
US11456173B2Sep 27, 2022
Methods for modifying photoresist profiles and tuning critical dimensions
APPLIED MATERIALS INC0 citations50
US10468238B2Nov 5, 2019
Methods and apparatus for co-sputtering multiple targets
APPLIED MATERIALS INC0 citations49
US12550651B2Feb 10, 2026
Selective etching of silicon-containing material relative to metal-doped boron films
APPLIED MATERIALS INC0 citations48