Inventor
CHEN GRACE H
US15 patents
⚠️ This page may combine multiple inventors who share the name “CHEN GRACE H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
10 patentsUS9726617B2Aug 8, 2017
Apparatus and methods for finding a best aperture and mode to enhance defect detection
KLA TENCOR CORP20 citations91
US10697900B2Jun 30, 2020
Correlating SEM and optical images for wafer noise nuisance identification
KLA TENCOR CORP6 citations83
US11270430B2Mar 8, 2022
Wafer inspection using difference images
KLA TENCOR CORP5 citations72
US10921262B2Feb 16, 2021
Correlating SEM and optical images for wafer noise nuisance identification
KLA TENCOR CORP0 citations62
US9523646B2Dec 20, 2016
Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
KLA TENCOR CORP0 citations52
US9347891B2May 24, 2016
Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
KLA TENCOR CORP1 citations52
US10132760B2Nov 20, 2018
Apparatus and methods for finding a best aperture and mode to enhance defect detection
KLA TENCOR CORP1 citations51
US9816940B2Nov 14, 2017
Wafer inspection with focus volumetric method
KLA TENCOR CORP1 citations46
US11668655B2Jun 6, 2023
Multimode defect classification in semiconductor inspection
KLA TENCOR CORP0 citations44
US9389166B2Jul 12, 2016
Enhanced high-speed logarithmic photo-detector for spot scanning system
KLA TENCOR CORP0 citations34
KLA TENCOR TECH CORP
3 patentsUS7106432B1Sep 12, 2006
Surface inspection system and method for using photo detector array to detect defects in inspection surface
KLA TENCOR TECH CORP35 citations91
US7505619B2Mar 17, 2009
System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
KLA TENCOR TECH CORP2 citations61
US7317527B1Jan 8, 2008
Spatial light modulator fourier transform
KLA TENCOR TECH CORP3 citations60