Inventor
BARTH EDWARD
US3 patents
Patents
3 patentsUS6939797B2Sep 6, 2005
Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
IBM26 citations91
US6737747B2May 18, 2004
Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
IBM43 citations91
US6849563B2Feb 1, 2005
Method and apparatus for controlling coating thickness
IBM10 citations72