Inventor
AGEMURA TOSHIHIDE
JP36 patents
⚠️ This page may combine multiple inventors who share the name “AGEMURA TOSHIHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
31 patentsUS7582885B2Sep 1, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP61 citations98
US7615765B2Nov 10, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP23 citations92
US7112792B2Sep 26, 2006
Defect inspection and charged particle beam apparatus
HITACHI HIGH TECH CORP16 citations92
US7550724B2Jun 23, 2009
Electron beam device and its control method
HITACHI HIGH TECH CORP9 citations83
US8026491B2Sep 27, 2011
Charged particle beam apparatus and method for charged particle beam adjustment
HITACHI HIGH TECH CORP9 citations80
US7348559B2Mar 25, 2008
Defect inspection and charged particle beam apparatus
HITACHI HIGH TECH CORP6 citations74
US11251011B2Feb 15, 2022
Electron microscope
HITACHI HIGH TECH CORP3 citations73
US9761409B2Sep 12, 2017
Composite charged particle detector, charged particle beam device, and charged particle detector
HITACHI HIGH TECH CORP5 citations72
US9536703B2Jan 3, 2017
Scanning electron microscope
HITACHI HIGH TECH CORP2 citations72
US11393657B2Jul 19, 2022
Electron beam device
HITACHI HIGH TECH CORP2 citations71
US10014151B2Jul 3, 2018
Composite charged particle beam device
HITACHI HIGH TECH CORP2 citations71
US10872744B2Dec 22, 2020
Charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations67
US11784022B2Oct 10, 2023
Electron beam apparatus
HITACHI HIGH TECH CORP0 citations62
US11043358B2Jun 22, 2021
Measuring apparatus and method of setting observation condition
HITACHI HIGH TECH CORP1 citations62
US10886101B2Jan 5, 2021
Charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US10249471B2Apr 2, 2019
Composite charged particle beam apparatus and control method thereof
HITACHI HIGH TECH CORP1 citations62
US11139143B2Oct 5, 2021
Spin polarimeter
HITACHI HIGH TECH CORP0 citations61
US11107656B2Aug 31, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations60
US12334297B2Jun 17, 2025
Electron gun and electron beam application device
HITACHI HIGH TECH CORP0 citations52
US7705303B2Apr 27, 2010
Defect inspection and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US11189457B2Nov 30, 2021
Scanning electron microscope
HITACHI HIGH TECH CORP0 citations51
US10128081B2Nov 13, 2018
Composite charged particle beam detector, charged particle beam device, and charged particle beam detector
HITACHI HIGH TECH CORP0 citations51
US9966218B2May 8, 2018
Electron beam device
HITACHI HIGH TECH CORP0 citations51
US9478389B2Oct 25, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP0 citations51
US9355814B2May 31, 2016
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US12217928B2Feb 4, 2025
Electron gun and electron microscope
HITACHI HIGH TECH CORP0 citations50
US12165828B2Dec 10, 2024
Electron gun and electron beam application apparatus
HITACHI HIGH TECH CORP0 citations50
US11610754B2Mar 21, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations49
US11183362B2Nov 23, 2021
Charged particle beam apparatus and sample observation method using the same
HITACHI HIGH TECH CORP0 citations48
US10297416B2May 21, 2019
Scanning electron microscope
HITACHI HIGH TECH CORP0 citations41
US10453648B2Oct 22, 2019
Charged particle bean device and information-processing device
HITACHI HIGH TECH CORP0 citations39