Inventor
OIKAWA MASAMI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “OIKAWA MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUSD791721SJul 11, 2017
Wafer boat
TOKYO ELECTRON LTD11 citations82
USD789310SJun 13, 2017
Wafer boat
TOKYO ELECTRON LTD10 citations82
USD772183SNov 22, 2016
Wafer boat
TOKYO ELECTRON LTD6 citations82
US11894249B2Feb 6, 2024
Control device, processing apparatus, and control method
TOKYO ELECTRON LTD2 citations72
USD769201SOct 18, 2016
Wafer boat
TOKYO ELECTRON LTD5 citations71
US11745231B2Sep 5, 2023
Cleaning method and processing apparatus
TOKYO ELECTRON LTD0 citations62
US11534805B2Dec 27, 2022
Cleaning method and processing apparatus
TOKYO ELECTRON LTD0 citations62
US12252786B2Mar 18, 2025
Cleaning method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11538678B2Dec 27, 2022
Deposition method
TOKYO ELECTRON LTD0 citations53
US12017261B2Jun 25, 2024
Processing apparatus and cleaning processing method
TOKYO ELECTRON LTD0 citations51
US11926891B2Mar 12, 2024
Cleaning method and processing apparatus
TOKYO ELECTRON LTD0 citations50
US11486041B2Nov 1, 2022
Film forming apparatus, control device, and pressure gauge adjustment method
TOKYO ELECTRON LTD0 citations50
US10256162B2Apr 9, 2019
Substrate processing system, control device, and substrate processing method
TOKYO ELECTRON LTD0 citations40