Inventor
BLATTNER JAKOB
CH11 patents
⚠️ This page may combine multiple inventors who share the name “BLATTNER JAKOB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
4 patentsUS7047984B2May 23, 2006
Device and method for cleaning articles used in the production of semiconductor components
BROOKS AUTOMATION INC29 citations89
US7699573B2Apr 20, 2010
Reticle manipulating device
BROOKS AUTOMATION INC11 citations79
US6880757B2Apr 19, 2005
Device and process for reading out identification information on reticles
BROOKS AUTOMATION INC0 citations45
US7478454B2Jan 20, 2009
Manipulating device for photomasks that provides possibilities for cleaning and inspection of photomasks
BROOKS AUTOMATION INC0 citations39
TEC SEM AG
4 patentsUS6540468B1Apr 1, 2003
Device and method for handling individual wafers
TEC SEM AG44 citations85
US5975825ANov 2, 1999
Transfer apparatus for wafers
TEC SEM AG8 citations72
US7287951B2Oct 30, 2007
Device and method for the harmonized positioning of wafer disks
TEC SEM AG2 citations60
US7682455B2Mar 23, 2010
Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic components
TEC SEM AG5 citations59