Inventor
PATHAK NITIN
IN17 patents
⚠️ This page may combine multiple inventors who share the name “PATHAK NITIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS11492705B2Nov 8, 2022
Isolator apparatus and methods for substrate processing chambers
APPLIED MATERIALS INC8 citations84
US11827980B2Nov 28, 2023
Isolator apparatus and methods for substrate processing chambers
APPLIED MATERIALS INC2 citations72
US11742185B2Aug 29, 2023
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC2 citations72
US10269614B2Apr 23, 2019
Susceptor design to reduce edge thermal peak
APPLIED MATERIALS INC3 citations72
US12347653B2Jul 1, 2025
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC0 citations62
US11952660B2Apr 9, 2024
Semiconductor processing chambers and methods for cleaning the same
APPLIED MATERIALS INC1 citations62
US12588451B2Mar 24, 2026
Bottom purge for semiconductor processing system
APPLIED MATERIALS INC0 citations61
US11952663B2Apr 9, 2024
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
APPLIED MATERIALS INC0 citations61
US11643725B2May 9, 2023
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
APPLIED MATERIALS INC1 citations61
US12012653B2Jun 18, 2024
Cleaning assemblies for substrate processing chambers
APPLIED MATERIALS INC1 citations59
US12183553B2Dec 31, 2024
Baffle implementation for improving bottom purge gas flow uniformity
APPLIED MATERIALS INC0 citations51
US11049699B2Jun 29, 2021
Gas box for CVD chamber
APPLIED MATERIALS INC0 citations51
US12266550B2Apr 1, 2025
Multiple process semiconductor processing system
APPLIED MATERIALS INC0 citations50
US12255054B2Mar 18, 2025
Methods to eliminate of deposition on wafer bevel and backside
APPLIED MATERIALS INC0 citations47