Inventor
RAMAMURTHI BADRI N
US14 patents
Patents
14 patentsUS11492705B2Nov 8, 2022
Isolator apparatus and methods for substrate processing chambers
APPLIED MATERIALS INC8 citations84
US11827980B2Nov 28, 2023
Isolator apparatus and methods for substrate processing chambers
APPLIED MATERIALS INC2 citations72
US11742185B2Aug 29, 2023
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC2 citations72
US12347653B2Jul 1, 2025
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC0 citations62
US12588451B2Mar 24, 2026
Bottom purge for semiconductor processing system
APPLIED MATERIALS INC0 citations61
US11952663B2Apr 9, 2024
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
APPLIED MATERIALS INC0 citations61
US11643725B2May 9, 2023
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater
APPLIED MATERIALS INC1 citations61
US11532463B2Dec 20, 2022
Semiconductor processing chamber and methods for cleaning the same
APPLIED MATERIALS INC0 citations60
US12460298B2Nov 4, 2025
Showerhead design to control stray deposition
APPLIED MATERIALS INC0 citations59
US12062567B2Aug 13, 2024
Systems and methods for substrate support temperature control
APPLIED MATERIALS INC1 citations59
US12012653B2Jun 18, 2024
Cleaning assemblies for substrate processing chambers
APPLIED MATERIALS INC1 citations59
US12266550B2Apr 1, 2025
Multiple process semiconductor processing system
APPLIED MATERIALS INC0 citations50
US12255054B2Mar 18, 2025
Methods to eliminate of deposition on wafer bevel and backside
APPLIED MATERIALS INC0 citations47
US11862475B2Jan 2, 2024
Gas mixer to enable RPS purging
APPLIED MATERIALS INC0 citations46