Inventor
SHANBHAG DAMODAR RAJARAM
US7 patents
Patents
7 patentsUS12227837B2Feb 18, 2025
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP2 citations72
US11427908B2Aug 30, 2022
Manifold valve for multiple precursors
LAM RES CORP2 citations71
US12163219B2Dec 10, 2024
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP0 citations60
US11859282B2Jan 2, 2024
Manifold valve for controlling multiple gases
LAM RES CORP0 citations60
US12272591B2Apr 8, 2025
Friction stir welding in semiconductor manufacturing applications
LAM RES CORP0 citations51
US10900124B2Jan 26, 2021
Substrate processing chamber with showerhead having cooled faceplate
LAM RES CORP0 citations50
US12539569B2Feb 3, 2026
Grouping features of showerheads in substrate processing systems
LAM RES CORP0 citations47