Inventor
BAILEY CURTIS WARREN
US4 patents
Patents
4 patentsUS10760158B2Sep 1, 2020
Ex situ coating of chamber components for semiconductor processing
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US11365479B2Jun 21, 2022
Ex situ coating of chamber components for semiconductor processing
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US12227837B2Feb 18, 2025
Ex situ coating of chamber components for semiconductor processing
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US12163219B2Dec 10, 2024
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP0 citations60