P

Inventor

KAUSHAL TONY

US8 patents
⚠️ This page may combine multiple inventors who share the name “KAUSHAL TONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

5 patents
US10760158B2Sep 1, 2020

Ex situ coating of chamber components for semiconductor processing

LAM RES CORP14 citations92
US10217614B2Feb 26, 2019

Ceramic gas distribution plate with embedded electrode

LAM RES CORP32 citations92
US11365479B2Jun 21, 2022

Ex situ coating of chamber components for semiconductor processing

LAM RES CORP8 citations83
US12227837B2Feb 18, 2025

Ex situ coating of chamber components for semiconductor processing

LAM RES CORP2 citations72
US12163219B2Dec 10, 2024

Ex situ coating of chamber components for semiconductor processing

LAM RES CORP0 citations60

APPLIED MATERIALS INC

1 patent
US7848076B2Dec 7, 2010

Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing

APPLIED MATERIALS INC3 citations59

LUBOMIRSKY DMITRY

1 patent
US8108981B2Feb 7, 2012

Method of making an electrostatic chuck with reduced plasma penetration and arcing

LUBOMIRSKY DMITRY1 citations48

NARENDRNATH KADTHALA RAMAYA

1 patent
US9202736B2Dec 1, 2015

Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing

NARENDRNATH KADTHALA RAMAYA1 citations45