Inventor
DE ROEST DAVID KURT
BE17 patents
Patents
17 patentsUS9916980B1Mar 13, 2018
Method of forming a structure on a substrate
ASM IP HOLDING BV480 citations98
US10403504B2Sep 3, 2019
Method for selectively depositing a metallic film on a substrate
ASM IP HOLDING BV6 citations83
US11664219B2May 30, 2023
Selective deposition of SiOC thin films
ASM IP HOLDING BV2 citations72
US11447861B2Sep 20, 2022
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
ASM IP HOLDING BV4 citations72
US11139163B2Oct 5, 2021
Selective deposition of SiOC thin films
ASM IP HOLDING BV3 citations72
US11094546B2Aug 17, 2021
Method for selectively depositing a metallic film on a substrate
ASM IP HOLDING BV1 citations72
US11022879B2Jun 1, 2021
Method of forming an enhanced unexposed photoresist layer
ASM IP HOLDING BV3 citations72
US12055863B2Aug 6, 2024
Structures and methods for use in photolithography
ASM IP HOLDING BV2 citations69
US11644758B2May 9, 2023
Structures and methods for use in photolithography
ASM IP HOLDING BV3 citations69
US12068156B2Aug 20, 2024
Selective deposition of SiOC thin films
ASM IP HOLDING BV0 citations62
US12033861B2Jul 9, 2024
Method for selectively depositing a metallic film on a substrate
ASM IP HOLDING BV0 citations62
US12000042B2Jun 4, 2024
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
ASM IP HOLDING BV0 citations62
US11851755B2Dec 26, 2023
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
ASM IP HOLDING BV0 citations62
US12222644B2Feb 11, 2025
Method of forming an enhanced unexposed photoresist layer
ASM IP HOLDING BV0 citations61
US12454752B2Oct 28, 2025
Method and apparatus for forming a patterned structure on a substrate
ASM IP HOLDING BV0 citations57
US12169361B2Dec 17, 2024
Substrate processing apparatus and method
ASM IP HOLDING BV0 citations48
US11735422B2Aug 22, 2023
Method of forming a photoresist underlayer and structure including same
ASM IP HOLDING BV0 citations45