Inventor
LEFEVRE SCOTT
US4 patents
Patents
4 patentsUS11626271B2Apr 11, 2023
Surface fluorination remediation for aluminium oxide electrostatic chucks
TOKYO ELECTRON LTD0 citations57
US12461034B2Nov 4, 2025
In-situ fluorescence-based chamber and wafer monitoring
TOKYO ELECTRON LTD0 citations49
US12308250B2May 20, 2025
Pre-etch treatment for metal etch
TOKYO ELECTRON LTD0 citations47
US12582017B2Mar 17, 2026
Bonding layer and process
TOKYO ELECTRON LTD0 citations41