Inventor
KAWASAKI TOMONORI
15 patents
⚠️ This page may combine multiple inventors who share the name “KAWASAKI TOMONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
5 patentsUS9630292B2Apr 25, 2017
Single side polishing apparatus for wafer
SUMCO CORP2 citations71
US10391607B2Aug 27, 2019
Single-wafer processing method of polishing one side of semiconductor wafer and single-wafer processing apparatus for polishing one side of semiconductor wafer
SUMCO CORP1 citations61
US9266213B2Feb 23, 2016
Method of polishing one side of wafer and single side polishing apparatus for wafer
SUMCO CORP2 citations61
US9919402B2Mar 20, 2018
Method of polishing wafer and wafer polishing apparatus
SUMCO CORP0 citations50
US10744616B2Aug 18, 2020
Wafer polishing method and apparatus
SUMCO CORP0 citations48
KOZASA KAZUAKI
3 patentsUS9305850B2Apr 5, 2016
Etching method and etching apparatus of semiconductor wafer
KOZASA KAZUAKI3 citations70
US8273260B2Sep 25, 2012
Etching method and etching apparatus of semiconductor wafer
KOZASA KAZUAKI2 citations60
US8992791B2Mar 31, 2015
Method of cleaning semiconductor wafer and semiconductor wafer
KOZASA KAZUAKI0 citations36