Inventor

LARSON ROBERT E

US6 patents

⚠️ This page may combine multiple inventors who share the name “LARSON ROBERT E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FSI INT INC

2 patents

US6979165B2Dec 27, 2005

Reduced footprint tool for automated processing of microelectronic substrates

FSI INT INC44 citations91

US7134827B2Nov 14, 2006

Reduced footprint tool for automated processing of microelectronic substrates

FSI INT INC5 citations58

TEL FSI INC

2 patents

US9321087B2Apr 26, 2016

Apparatus and method for scanning an object through a fluid spray

TEL FSI INC2 citations55

US10020207B2Jul 10, 2018

Apparatus and method for scanning an object through a fluid stream

TEL FSI INC1 citations44

INTERACTIVE DESIGN INC

1 patent

US6959108B1Oct 25, 2005

Image based defect detection system

INTERACTIVE DESIGN INC111 citations89

LARSON ROBERT E

1 patent

US7472609B1Jan 6, 2009

Fluid meter

LARSON ROBERT E12 citations71