Inventor
SIMONDET SEAN D
US3 patents
Patents
3 patentsUS6979165B2Dec 27, 2005
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC44 citations91
US6822413B2Nov 23, 2004
Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector
FSI INT INC43 citations88
US7134827B2Nov 14, 2006
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC5 citations58