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Inventor
ZIMMERMAN DAVID C
US
4 patents
⚠️ This page may combine multiple inventors who share the name “ZIMMERMAN DAVID C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
2 patents
US6979165B2
Dec 27, 2005
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC
44 citations
91
US7134827B2
Nov 14, 2006
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC
5 citations
58
TEL FSI INC
2 patents
US9321087B2
Apr 26, 2016
Apparatus and method for scanning an object through a fluid spray
TEL FSI INC
2 citations
55
US10020207B2
Jul 10, 2018
Apparatus and method for scanning an object through a fluid stream
TEL FSI INC
1 citations
44