Inventor
MACIEJ TODD K
US4 patents
⚠️ This page may combine multiple inventors who share the name “MACIEJ TODD K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
3 patentsUS6979165B2Dec 27, 2005
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC44 citations91
US6845779B2Jan 25, 2005
Edge gripping device for handling a set of semiconductor wafers in an immersion processing system
FSI INT INC7 citations70
US7134827B2Nov 14, 2006
Reduced footprint tool for automated processing of microelectronic substrates
FSI INT INC5 citations58