Inventor

MATTHYS QUIRIN W

US2 patents

Patents

2 patents

US6979165B2Dec 27, 2005

Reduced footprint tool for automated processing of microelectronic substrates

FSI INT INC44 citations91

US7134827B2Nov 14, 2006

Reduced footprint tool for automated processing of microelectronic substrates

FSI INT INC5 citations58