Inventor
ABBE ROBERT C
12 patents
⚠️ This page may combine multiple inventors who share the name “ABBE ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADE CORP
11 patentsUS5511005AApr 23, 1996
Wafer handling and processing system
ADE CORP249 citations96
US4897015AJan 30, 1990
Rotary to linear motion robot arm
ADE CORP136 citations95
US4457664AJul 3, 1984
Wafer alignment station
ADE CORP133 citations94
US4860229AAug 22, 1989
Wafer flatness station
ADE CORP42 citations92
US4849916AJul 18, 1989
Improved spatial resolution measurement system and method
ADE CORP24 citations92
US4158171AJun 12, 1979
Wafer edge detection system
ADE CORP33 citations92
US3990005ANov 2, 1976
Capacitive thickness gauging for ungrounded elements
ADE CORP46 citations92
US4217542AAug 12, 1980
Self inverting gauging system
ADE CORP26 citations81
US4910453AMar 20, 1990
Multi-probe grouping system with nonlinear error correction
ADE CORP14 citations73
US4353029AOct 5, 1982
Self inverting gauging system
ADE CORP9 citations73
US4228392AOct 14, 1980
Second order correction in linearized proximity probe
ADE CORP6 citations62