Inventor
PODUJE NOEL S
22 patents
Patents
22 patentsUS5642298AJun 24, 1997
Wafer testing and self-calibration system
ADE CORP155 citations96
US5511005AApr 23, 1996
Wafer handling and processing system
ADE CORP249 citations96
US5102280AApr 7, 1992
Robot prealigner
ADE CORP109 citations95
US4750141AJun 7, 1988
Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same
ADE CORP105 citations95
US5456561AOct 10, 1995
Robot prealigner
ADE CORP62 citations94
US5332352AJul 26, 1994
Robot prealigner
ADE CORP40 citations94
US4457664AJul 3, 1984
Wafer alignment station
ADE CORP133 citations94
US4958129ASep 18, 1990
Prealigner probe
ADE CORP46 citations92
US4860229AAug 22, 1989
Wafer flatness station
ADE CORP42 citations92
US4849916AJul 18, 1989
Improved spatial resolution measurement system and method
ADE CORP24 citations92
US4158171AJun 12, 1979
Wafer edge detection system
ADE CORP33 citations92
US3990005ANov 2, 1976
Capacitive thickness gauging for ungrounded elements
ADE CORP46 citations92
US3986109AOct 12, 1976
Self-calibrating dimension gauge
ADE CORP45 citations92
US4918376AApr 17, 1990
A.C. capacitive gauging system
ADE CORP41 citations91
US5557267ASep 17, 1996
Apparatus and methods for measurement system calibration
ADE CORP23 citations90
US4217542AAug 12, 1980
Self inverting gauging system
ADE CORP26 citations81
US4692695ASep 8, 1987
Conductivity-type sensor
ADE CORP15 citations74
US4910453AMar 20, 1990
Multi-probe grouping system with nonlinear error correction
ADE CORP14 citations73
US4353029AOct 5, 1982
Self inverting gauging system
ADE CORP9 citations73
US6025787AFeb 15, 2000
Apparatus and methods for measurement system calibration
ADE CORP14 citations71
US4228392AOct 14, 1980
Second order correction in linearized proximity probe
ADE CORP6 citations62
US7175214B2Feb 13, 2007
Wafer gripping fingers to minimize distortion
ADE CORP0 citations44