Inventor
SCHAIBLE PAUL M
6 patents
Patents
6 patentsUS4944836AJul 31, 1990
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
IBM539 citations97
US3994793ANov 30, 1976
Reactive ion etching of aluminum
IBM86 citations93
US4352716AOct 5, 1982
Dry etching of copper patterns
IBM39 citations91
US4396458AAug 2, 1983
Method for forming planar metal/insulator structures
IBM34 citations89
US4132586AJan 2, 1979
Selective dry etching of substrates
IBM26 citations79
US4430365AFeb 7, 1984
Method for forming conductive lines and vias
IBM26 citations78