P

Inventor

CHANG CHUNG-HSING

TW43 patents
⚠️ This page may combine multiple inventors who share the name “CHANG CHUNG-HSING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

13 patents
US6982135B2Jan 3, 2006

Pattern compensation for stitching

TAIWAN SEMICONDUCTOR MFG54 citations95
US7131102B2Oct 31, 2006

Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era

TAIWAN SEMICONDUCTOR MFG15 citations92
US6861180B2Mar 1, 2005

Contact printing as second exposure of double exposure attenuated phase shift mask process

TAIWAN SEMICONDUCTOR MFG34 citations92
US6711732B1Mar 23, 2004

Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era

TAIWAN SEMICONDUCTOR MFG25 citations92
US6720116B1Apr 13, 2004

Process flow and pellicle type for 157 nm mask making

TAIWAN SEMICONDUCTOR MFG17 citations82
US6830853B1Dec 14, 2004

Chrome mask dry etching process to reduce loading effect and defects

TAIWAN SEMICONDUCTOR MFG18 citations81
US7026106B2Apr 11, 2006

Exposure method for the contact hole

TAIWAN SEMICONDUCTOR MFG9 citations74
US6861182B2Mar 1, 2005

Tri-tone attenuated phase shift trim mask for double exposure alternating phase shift mask process

TAIWAN SEMICONDUCTOR MFG5 citations63
US7312021B2Dec 25, 2007

Holographic reticle and patterning method

TAIWAN SEMICONDUCTOR MFG3 citations62
US7036108B2Apr 25, 2006

Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era

TAIWAN SEMICONDUCTOR MFG1 citations62
US7013453B2Mar 14, 2006

Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution ERA

TAIWAN SEMICONDUCTOR MFG1 citations62
US6830702B2Dec 14, 2004

Single trench alternating phase shift mask fabrication

TAIWAN SEMICONDUCTOR MFG4 citations60
US7722997B2May 25, 2010

Holographic reticle and patterning method

TAIWAN SEMICONDUCTOR MFG0 citations52

AVIACOMM INC

4 patents

MO SHIH HSIUNG

4 patents

ARIMA COMPUTER CORP

3 patents

MICRO STAR INTL CO LTD

3 patents

CHANG CHUNG HSING

2 patents

CHANG SHIH-MING

2 patents

CHANG CHUNG-HSING

2 patents

DYNAPACK INTERNATIONAL TECH CORPORATION

2 patents

BRIVIEW CORP

1 patent

WANG CHUN-LIN

1 patent

MO SHIH

1 patent

(unassigned)

1 patent

TAIWAN SEMINCONDUCTOR MFG CO L

1 patent

BUDDHIST TZU CHI MEDICAL FOUND

1 patent

RDW INC

1 patent

TIPOSI INC

1 patent