Inventor
MORITA TERUYA
JP14 patents
Patents
14 patentsUS5621982AApr 22, 1997
Electronic substrate processing system using portable closed containers and its equipments
SHINKO ELECTRIC CO LTD605 citations99
US6152669ANov 28, 2000
Mechanical interface apparatus
SHINKO ELECTRIC CO LTD349 citations98
US5431600AJul 11, 1995
Automatic transferring system using portable closed container
SHINKO ELECTRIC CO LTD131 citations98
US5320218AJun 14, 1994
Closed container to be used in a clean room
SHINKO ELECTRIC CO LTD477 citations98
US5806574ASep 15, 1998
Portable closed container
SHINKO ELECTRIC CO LTD54 citations96
US5746008AMay 5, 1998
Electronic substrate processing system using portable closed containers
SHINKO ELECTRIC CO LTD87 citations96
US5363867ANov 15, 1994
Article storage house in a clean room
SHINKO ELECTRIC CO LTD98 citations96
US5303482AApr 19, 1994
Wafer airtight keeping unit and keeping facility thereof
SHINKO ELECTRIC CO LTD58 citations96
US5628604AMay 13, 1997
Conveying system
SHINKO ELECTRIC CO LTD91 citations95
US6530466B2Mar 11, 2003
Overhead conveyance device and overhead conveyance vehicle
SHINKO ELECTRIC CO LTD17 citations92
US5433574AJul 18, 1995
Gas purge unit for a portable container
SHINKO ELECTRIC CO LTD45 citations92
US5389769AFeb 14, 1995
ID recognizing system in semiconductor manufacturing system
SHINKO ELECTRIC CO LTD50 citations92
US6427824B1Aug 6, 2002
Overhead conveying device and overhead conveying vehicle
SHINKO ELECTRIC CO LTD13 citations74
US5743424AApr 28, 1998
Sealable container
SHINKO ELECTRIC CO LTD8 citations74