Inventor
OKUNO ATSUSHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OKUNO ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINKO ELECTRIC CO LTD
13 patentsUS5621982AApr 22, 1997
Electronic substrate processing system using portable closed containers and its equipments
SHINKO ELECTRIC CO LTD605 citations99
US5320218AJun 14, 1994
Closed container to be used in a clean room
SHINKO ELECTRIC CO LTD477 citations98
US5746008AMay 5, 1998
Electronic substrate processing system using portable closed containers
SHINKO ELECTRIC CO LTD87 citations96
US5363867ANov 15, 1994
Article storage house in a clean room
SHINKO ELECTRIC CO LTD98 citations96
US5303482AApr 19, 1994
Wafer airtight keeping unit and keeping facility thereof
SHINKO ELECTRIC CO LTD58 citations96
US6095054AAug 1, 2000
Transport system
SHINKO ELECTRIC CO LTD82 citations94
US6307875B1Oct 23, 2001
Induction heating furnace and bottom tapping mechanism thereof
SHINKO ELECTRIC CO LTD17 citations92
US5433574AJul 18, 1995
Gas purge unit for a portable container
SHINKO ELECTRIC CO LTD45 citations92
US5389769AFeb 14, 1995
ID recognizing system in semiconductor manufacturing system
SHINKO ELECTRIC CO LTD50 citations92
US6507598B2Jan 14, 2003
Induction heating furnace and bottom tapping mechanism thereof
SHINKO ELECTRIC CO LTD6 citations73
US6507599B2Jan 14, 2003
Induction heating furnace and bottom tapping mechanism thereof
SHINKO ELECTRIC CO LTD5 citations73
US6385231B2May 7, 2002
Induction heating furnace and bottom tapping mechanism thereof
SHINKO ELECTRIC CO LTD2 citations62
US6487234B2Nov 26, 2002
Induction heating furnace and bottom tapping mechanism thereof
SHINKO ELECTRIC CO LTD0 citations52