Inventor
HAYASHI MITSUHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINKO ELECTRIC CO LTD
9 patentsUS5621982AApr 22, 1997
Electronic substrate processing system using portable closed containers and its equipments
SHINKO ELECTRIC CO LTD605 citations99
US5320218AJun 14, 1994
Closed container to be used in a clean room
SHINKO ELECTRIC CO LTD477 citations98
US5746008AMay 5, 1998
Electronic substrate processing system using portable closed containers
SHINKO ELECTRIC CO LTD87 citations96
US5363867ANov 15, 1994
Article storage house in a clean room
SHINKO ELECTRIC CO LTD98 citations96
US5303482AApr 19, 1994
Wafer airtight keeping unit and keeping facility thereof
SHINKO ELECTRIC CO LTD58 citations96
US5433574AJul 18, 1995
Gas purge unit for a portable container
SHINKO ELECTRIC CO LTD45 citations92
US5389769AFeb 14, 1995
ID recognizing system in semiconductor manufacturing system
SHINKO ELECTRIC CO LTD50 citations92
US4868364ASep 19, 1989
Seam welder with feedback control to compensate for varying welding speed
SHINKO ELECTRIC CO LTD3 citations61
US4249063AFeb 3, 1981
Circuit for high frequency arc welding apparatus using a low frequency switch
SHINKO ELECTRIC CO LTD1 citations48