Inventor
ITOH KATSUYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “ITOH KATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
7 patentsUS5557110ASep 17, 1996
Aperture for use in electron beam system for pattern writing
NEC CORP28 citations91
US5438207AAug 1, 1995
Electron beam direct writing system for ULSI lithography with facilitated rotation and gain corrections of shot patterns and electron beam direct writing method for same
NEC CORP20 citations83
US5994036ANov 30, 1999
Method of forming a resist pattern
NEC CORP18 citations82
US5593761AJan 14, 1997
Electron beam shaping mask for an electron beam system with pattern writing capability
NEC CORP8 citations73
US6296925B1Oct 2, 2001
Aperture for charged beam drawing machine and method for forming the same
NEC CORP4 citations61
US6288407B1Sep 11, 2001
Electron beam-writing apparatus and electron beam-writing method
NEC CORP5 citations61
US5784150AJul 21, 1998
Electron-beam cell projection lithography system
NEC CORP1 citations51
HITACHI LTD
3 patentsUS6640332B2Oct 28, 2003
Wiring pattern decision method considering electrical length and multi-layer wiring board
HITACHI LTD11 citations71
US7251802B2Jul 31, 2007
Method and system for deciding a wiring route
HITACHI LTD5 citations58
US7735040B2Jun 8, 2010
Method for designing cell layout of a semiconductor integrated circuit with logic having a data flow
HITACHI LTD0 citations51