Inventor
KURATA SHUNSUKE
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KURATA SHUNSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OLYMPUS CORP
7 patentsUS7102743B2Sep 5, 2006
Semiconductor wafer inspection apparatus
OLYMPUS CORP26 citations90
US7053393B2May 30, 2006
Alignment apparatus for object on stage
OLYMPUS CORP9 citations72
US7084383B2Aug 1, 2006
Image processing apparatus
OLYMPUS CORP2 citations62
US7456947B2Nov 25, 2008
Inspecting apparatus and inspecting method
OLYMPUS CORP5 citations61
US7365295B2Apr 29, 2008
Image inspection system for correcting focal position in autofocusing
OLYMPUS CORP3 citations61
US7369237B2May 6, 2008
Substrate processing apparatus and substrate processing system
OLYMPUS CORP4 citations60
US7308329B2Dec 11, 2007
Method and apparatus for inspecting semiconductor wafer
OLYMPUS CORP6 citations55
OLYMPUS OPTICAL CO
3 patentsUS6549825B2Apr 15, 2003
Alignment apparatus
OLYMPUS OPTICAL CO77 citations96
US6549290B2Apr 15, 2003
Method and apparatus for aligning target object
OLYMPUS OPTICAL CO16 citations82
US6710320B2Mar 23, 2004
Small sized imaging device which detects position information and image information
OLYMPUS OPTICAL CO11 citations72