Inventor
MARTIN RAYMOND S
US12 patents
⚠️ This page may combine multiple inventors who share the name “MARTIN RAYMOND S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASYST TECHNOLOGIES
9 patentsUS6220808B1Apr 24, 2001
Ergonomic, variable size, bottom opening system compatible with a vertical interface
ASYST TECHNOLOGIES99 citations98
US6216873B1Apr 17, 2001
SMIF container including a reticle support structure
ASYST TECHNOLOGIES182 citations98
US6579052B1Jun 17, 2003
SMIF pod storage, delivery and retrieval system
ASYST TECHNOLOGIES242 citations97
US5988233ANov 23, 1999
Evacuation-driven SMIF pod purge system
ASYST TECHNOLOGIES171 citations96
US6591162B1Jul 8, 2003
Smart load port with integrated carrier monitoring and fab-wide carrier management system
ASYST TECHNOLOGIES57 citations95
US6704998B1Mar 16, 2004
Port door removal and wafer handling robotic system
ASYST TECHNOLOGIES35 citations92
US6398032B2Jun 4, 2002
SMIF pod including independently supported wafer cassette
ASYST TECHNOLOGIES44 citations92
US5944475AAug 31, 1999
Rotated, orthogonal load compatible front-opening interface
ASYST TECHNOLOGIES40 citations92
US5653565AAug 5, 1997
SMIF port interface adaptor
ASYST TECHNOLOGIES41 citations90