Inventor
EMMI PETER A
US5 patents
Patents
5 patentsUS6178660B1Jan 30, 2001
Pass-through semiconductor wafer processing tool and process for gas treating a moving semiconductor wafer
IBM85 citations96
US6268621B1Jul 31, 2001
Vertical channel field effect transistor
IBM71 citations95
US6278147B1Aug 21, 2001
On-chip decoupling capacitor with bottom hardmask
IBM19 citations92
US6488778B1Dec 3, 2002
Apparatus and method for controlling wafer environment between thermal clean and thermal processing
IBM44 citations89
US6387754B2May 14, 2002
Method of forming an on-chip decoupling capacitor with bottom hardmask
IBM8 citations73