Inventor
GARG NEENA
US7 patents
Patents
7 patentsUS6531375B1Mar 11, 2003
Method of forming a body contact using BOX modification
IBM78 citations96
US6488778B1Dec 3, 2002
Apparatus and method for controlling wafer environment between thermal clean and thermal processing
IBM44 citations89
US6495429B1Dec 17, 2002
Controlling internal thermal oxidation and eliminating deep divots in SIMOX by chlorine-based annealing
IBM20 citations88
US6784072B2Aug 31, 2004
Control of buried oxide in SIMOX
IBM9 citations70
US6967376B2Nov 22, 2005
Divot reduction in SIMOX layers
IBM2 citations60
US6531411B1Mar 11, 2003
Surface roughness improvement of SIMOX substrates by controlling orientation of angle of starting material
IBM5 citations56
US7492008B2Feb 17, 2009
Control of buried oxide in SIMOX
IBM0 citations48