Inventor
WRIGHT MARILYN I
US21 patents
⚠️ This page may combine multiple inventors who share the name “WRIGHT MARILYN I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
20 patentsUS6893967B1May 17, 2005
L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materials
ADVANCED MICRO DEVICES INC246 citations98
US6774998B1Aug 10, 2004
Method and apparatus for identifying misregistration in a complimentary phase shift mask process
ADVANCED MICRO DEVICES INC59 citations96
US6716646B1Apr 6, 2004
Method and apparatus for performing overlay measurements using scatterometry
ADVANCED MICRO DEVICES INC69 citations96
US6900002B1May 31, 2005
Antireflective bi-layer hardmask including a densified amorphous carbon layer
ADVANCED MICRO DEVICES INC45 citations93
US6864556B1Mar 8, 2005
CVD organic polymer film for advanced gate patterning
ADVANCED MICRO DEVICES INC30 citations93
US7262864B1Aug 28, 2007
Method and apparatus for determining grid dimensions using scatterometry
ADVANCED MICRO DEVICES INC22 citations92
US6764949B2Jul 20, 2004
Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication
ADVANCED MICRO DEVICES INC53 citations92
US6650423B1Nov 18, 2003
Method and apparatus for determining column dimensions using scatterometry
ADVANCED MICRO DEVICES INC34 citations92
US6509201B1Jan 21, 2003
Method and apparatus for monitoring wafer stress
ADVANCED MICRO DEVICES INC42 citations92
US6479309B1Nov 12, 2002
Method and apparatus for determining process layer conformality
ADVANCED MICRO DEVICES INC34 citations92
US6458610B1Oct 1, 2002
Method and apparatus for optical film stack fault detection
ADVANCED MICRO DEVICES INC20 citations91
US6773939B1Aug 10, 2004
Method and apparatus for determining critical dimension variation in a line structure
ADVANCED MICRO DEVICES INC15 citations84
US6657716B1Dec 2, 2003
Method and apparatus for detecting necking over field/active transitions
ADVANCED MICRO DEVICES INC14 citations84
US6426262B1Jul 30, 2002
Method of analyzing the effects of shadowing of angled halo implants
ADVANCED MICRO DEVICES INC18 citations83
US6913958B1Jul 5, 2005
Method for patterning a feature using a trimmed hardmask
ADVANCED MICRO DEVICES INC9 citations74
US6764947B1Jul 20, 2004
Method for reducing gate line deformation and reducing gate line widths in semiconductor devices
ADVANCED MICRO DEVICES INC9 citations74
US6766215B1Jul 20, 2004
Method and apparatus for detecting necking over field/active transitions
ADVANCED MICRO DEVICES INC8 citations74
US6804014B1Oct 12, 2004
Method and apparatus for determining contact opening dimensions using scatterometry
ADVANCED MICRO DEVICES INC7 citations73
US6697153B1Feb 24, 2004
Method and apparatus for analyzing line structures
ADVANCED MICRO DEVICES INC11 citations71
US6261936B1Jul 17, 2001
Poly gate CD passivation for metrology control
ADVANCED MICRO DEVICES INC4 citations63