Inventor
MOKUO SHORI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “MOKUO SHORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS5671544ASep 30, 1997
Substrate drying apparatus and substrate drying method
TOKYO ELECTRON LTD56 citations96
US5575079ANov 19, 1996
Substrate drying apparatus and substrate drying method
TOKYO ELECTRON LTD48 citations96
US5845660ADec 8, 1998
Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus
TOKYO ELECTRON LTD84 citations95
US6954585B2Oct 11, 2005
Substrate processing method and apparatus
TOKYO ELECTRON LTD21 citations92
US5911232AJun 15, 1999
Ultrasonic cleaning device
TOKYO ELECTRON LTD39 citations92
US5266812ANov 30, 1993
Substrate detector with light emitting and receiving elements arranged in a staggered fashion
TOKYO ELECTRON LTD45 citations92
US5319216AJun 7, 1994
Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter
TOKYO ELECTRON LTD52 citations89
US6022185AFeb 8, 2000
Substrate transferring device
TOKYO ELECTRON LTD19 citations83
US5666381ASep 9, 1997
Communication system used in semiconductor device manufacturing equipment
TOKYO ELECTRON LTD7 citations73
US5406092AApr 11, 1995
Apparatus and method using optical sensors recessed in channel walls for detector substrates in a support
TOKYO ELECTRON LTD17 citations73
US6715348B2Apr 6, 2004
Method and apparatus for detecting liquid level
TOKYO ELECTRON LTD6 citations62
US6573482B2Jun 3, 2003
Heating device, liquid processing apparatus using the heating device and method of detecting failure thereof
TOKYO ELECTRON LTD4 citations62